The Korean Journal of Ceramics

한국세라믹학회 (The Korean Ceramic Society)
권호 표지

Chemical Vapour Deposited Diamond for Thermal and Optical Applications

  • Koidi, P. (Fraunhofer-Institut fur Angewandte Festkorperphysik) ;
  • Wild, C. (Fraunhofer-Institut fur Angewandte Festkorperphysik) ;
  • Woerner, E. (Fraunhofer-Institut fur Angewandte Festkorperphysik) ;
  • Muller-Sebert, M. (Fraunhofer-Institut fur Angewandte Festkorperphysik) ;
  • Funer, M. (Fraunhofer-Institut fur Angewandte Festkorperphysik) ;
  • Jehle, M. (Fraunhofer-Institut fur Angewandte Festkorperphysik)
  • 발행 : 1996.12.01
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초록

Considerable progress in the development of CVD techniques for the deposition of diamond films has been achieved recently. Despite the polycrystalline structure of this material, its physical properties are now approaching those of natural type IIa diamond crystals. This paper will given some insight into the current status of CVD diamond thechnology with emphasis on optical and thermal applications. The role of process gas impurities like nitrogen will be discussed.

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참고문헌

  1. The Properties of Natural and Synthetic Diamond J.E. Field(ed. by)
  2. Emis Datareviews Series No. 9 Properties and Growth of Diamond Gordon Davies(ed. by)
  3. in Ref. 2 P. K. Bachmann
  4. Proc. $I^{st}$ Int. Symp. on Diamond and Diamond-Like Films v.89-12 N. Ohtake;H. Tokura;Y. Kuriyama;Y. Mahimo;M. Yoshikawa
  5. Diamond and Related Mat v.5 E. Worner;C. Wild;W. Muller-Sebert;R. Locher;P. Koidl
  6. Appl. Phys. Lett. v.68 W. Muller-Sebert;E. Worner;F. Fuchs;C. Wild;P. Koidl
  7. Appl. Phys. Lett. v.67 R. Samlenski;C. Haug;R. Brenn;C. Wild;R. Locher;P. Koidl