The Korean Journal of Ceramics

한국세라믹학회 (The Korean Ceramic Society)
권호 표지

The Applications of Sol-Gel Derived Tin Oxide Thin Films

  • Park, Sung-Soon (Dept. of Mater. Sci. and Eng., Univ. of California-Los Angeles, Los Angeles, CA 90024, USA) ;
  • John D. Mackenzie (Dept. of Mater. Sci. and Eng., Univ. of California-Los Angeles, Los Angeles, CA 90024, USA)
  • 발행 : 1996.03.01
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

Transparent conducting $SnO_2$-based thin films have been coated on float substrates such as fused quartz, and ceramic fiber cloths such as the Nexel and E-glass cloth from tin alkoxides by the sol-gel technique. Also, thin films of alternating layers of $SnO_2$ and $SiO_2$ have been fabricated by dip coating. The sheet resistance and average visible transmittance of the films were investigated in the aspect of the applications as transparent electrodes such as liquid crystal displays, photo-detectors and solar cells. The Nextel and E-glass cloths coated with antimony-doped tin oxide (ATO) had sheet resistance of as low as $20 \;ohm/{\Box}$ and $120ohm/\;{\Box}$, respectively. The promotion effects of additives as $La_2O_3$ and Pt on the ethanol gas sensing properties of the films were investigated in the aspects of the applications as an alcohol sensor and a breath alcohol checker. Possible evidence of quantum well effects in the oxide multilayers of $SnO_2$ and $SiO_2$ was investigated.

키워드

참고문헌

  1. Thin Solid Films: Review Paper v.102 Transparent Conductors-a Status Review K. L. Chopra;S. Major;D. K. Pandya
  2. J. Mat. Sci. Review v.19 Semiconducting Transparent Thin Films Their Properties and Applications A. L. Dawar;J. C. Joshi
  3. Mat. Res. Bull. v.14 In₂O₃: (Sn) and SnO₂: (F) Films-Applications to Solar Energy Conversion, Part II-Electrical and Optical Prperties J. C. Manifacier;L. Szepessy;J. F. Bresse;M. Perotin
  4. Chemical Sensor Technology T. Seiyama
  5. The Stannic Oxide Gas Sensor K. Ihokura;J. Watson
  6. J. Quantum Electronics v.QE-22 no.9 A Bird's Eye View on the Evolution of Semiconductor Superlattices and Quantum Wells L. Esaki
  7. Appl. Phys. Lett. v.45 no.1 Novel Hybrid Optically Bistable Switch: The Quantum Well Self-Electro-Optic Effect Device D. A. B. Miller;D. S. Chemla;T. C. Damen
  8. SPIE Proc., Quantum Wells and Superlattices in Optoelectronic Devices and Integrated Optics v.861 Multiple Quantum Well Devices for Monolithic Integrated Optoelectronic T. H. Wood
  9. Ceram. Trans. (Sol-Gel Sci. and Tech.) v.55 Optical Properties of Multilayer Thin Films Q. Wu;Y. Xu;S. S. Park;E. P. Bescher;J. D. Mackenzie
  10. Mat. Res. Bull. v.14 In₂O₃:(Sn) and SnO₂: (F) Films-Applications to Solar Energy Conversion, Part I-Preparation and Characterization J. C. Manifacier;L. Szepessy;J. F. Bresse;M. Perotin
  11. Thin Solid Films v.77 Tin Oxide Coatings: Physical Properties and Applications H. D. Waal;F. Simonis
  12. Thin Solid Films v.72 Reactive Magnatron Deposition of Transparent Conductive Films J. F. Smith;A. J. Aronson;D. Chen;W. H. Class
  13. Thin Solid Films v.223 Electrical and Optical Properties of Indium Tin Oxide Thin Films Deposited on Unheated Substrates by D. C. reactive Sputtering T. Karasawa;Y. Miyata
  14. Thin Solid Films v.128 Process Study of Chemically Vapor-Deposited $SnO_x$ (x=2) Films J. C. Lou;M. S. Lin;J. J. Chyi;J. H. Shieh
  15. Thin Solid Films v.128 A Method for the Deposition of Transparent Conducting Thin Films of Tin Oxide R. D. Tarey;T. A. Raju
  16. Thin Solid Films v.221 Optical Properties and Structures of Thermally Evaporated Tin Oxide Films D. W. Lane;J. A. Coath;K. D. Rogers;B. J. Hunnikin;H. S. Beldon
  17. J. Appl. Phys. v.53 Hall Measurement Studies and and Electrical Conduction Model of Tin Oxide Ultrafine Particle Films H. Ogawa;M. Nishikawa;A. Abe
  18. Sol-Gel Technology for Thin Films, Fibers, Preforms, Electronics, and Specially Shapes L. C. Klein
  19. Mater. Lett. v.22 Sol-Gel Derived Antimonu-Doped Tin Oxide Coatings on Ceramic Cloths S. S. Park;H. Zheng;J. D. Macklenzie
  20. Thin Solid Films v.258 Sol-Gel-Derived Tin Oxide Thin Films S. S. Park;J. D. Mackenzie
  21. J. Am. Ceram. Soc. v.78 Microstructure Effects in Multidipped Tin Oxide Films S. S. Park;J. D. Mackenzie
  22. Appl. Opt. v.19 Investigation of Porous Oxides as an Antirefractive Coating for Glass Surface B. E. Yoldas
  23. J. Vac. Sci. Technol. v.A4 Characterization of Nitride Coatings by Auger Electron Spectroscopy and X-ray Photoelectron Spectroscopy S. Hofman
  24. Philips Res. Rep. v.13 A Method Specific Resistivity and Hall Effects of Discs of Arbitrary Shape L. J. Van Der Pauw
  25. Thin Solid Films v.201 Fundamentals of Sol-Gel Dip Coating C. J. Brinker;G. C. Frye;C. S. Ashley
  26. J. of Non-Cryst. Solids v.147;148 Review of Sol-Gel Thin Film Formation C. J. Brinker;A. J. Hurd;P. R. Schunk;G. C. Frye;C. S. Ashley
  27. accepted to be published in Thin Solid Films Thickness and Microstructure Effects on Alcohol Sensing of Tin Oxide Thin Films S. S. Park;J. D. Mackenzie
  28. J. Electrochem. Soc.: Reviews and News v.123 Physical Properties of SnO₂ Materials I. Preparation and Defect Structure Z. M. Jarzebski;J. P. Marton
  29. J. Appl. Phys. v.51 Electrical and Optical Properties of Undoped and Antimony-Doped Tin Oxide Films E. Shanti;V. Dutta;A. Banerjee;K. L. Chopra
  30. J. Electrochem. Soc. v.119 The Nature of Semiconductivity in Polycrystalline Tin Oxide C. A. Vincent
  31. Sensors and Actuators v.B21 Effects of Palladium Doping and Film Thickness on the H₂-gas Sensing Characteristics K. H. Cha;H. C. Park;K. H. Kim
  32. J. Electrochem. Soc. v.126 A Model for the Operation of a Thin $SnO_x$ Conductance-modulation Carbon Monoxide Sensor H. Windischman;P. Mark
  33. Mater. Lett. v.17 Ethanol Gas Sensing Properties of SnO₂-Based Thin-Film Sensors Prepared by the Sol-Gel Process S. S. Park;H. Zheng;J. D. Mackenzie
  34. IEEE J. Qunatum Electronics v.QE-22 A bird's-eye View on the Evolution of Semiconductor Superlattices Wells L. Esaki
  35. Appl. Phys. Lett. v.45 Novel Hybrid Optically Bistable Switch: The Quantum well Sel-f-electro-optic Effect Device D. A. B. Miller;D. S. Chema;T. C. Damen