E2M - 전기 전자와 첨단 소재 (Electrical & Electronic Materials)

  • 제7권6호
  • /
  • Pages.462-472
  • /
  • 1994
  • /
  • 2982-6268(pISSN)
  • /
  • 2982-6306(eISSN)
한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
권호 표지

SF$_6$+$N_2$혼합기체의 전자 이동속도 측정 및 수송계수 해석

The measurement of electron drift velocity and analysis of transport coefficients in SF$_6$+$N_2$ gas

  • 하성철 (동국대학교 전기공학과) ;
  • 하영선 (대림전문대학 제어계측학과)
  • 발행 : 1994.11.01
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초록

In this paper, electron drift velocity is experimentally measured in SF$_{6}$+N$_{2}$ Gas by induced cur-rent method and quantitaive production of electron transport coefficient is calculated by backward-prolongation of Boltzmann equation. Then electron energy distribution function and attachment coefficients are calculated. This paper can use the electron drift velocity by experimentally and the electron transport coefficient by calculated as a basic data of mixed Gas by comparing and investigating.g.

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