Journal of the Korean Institute of Telematics and Electronics (대한전자공학회논문지)
- Volume 25 Issue 11
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- Pages.1335-1341
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- 1988
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- 1016-135X(pISSN)
Fabrication and Its Biomedical Application of the pH-ISFET Microprobe
pH-ISFET 마이크로프로브의 製作과 그 生醫學的 應用
- Lee, Kwang-Man (Dept. of Elec. Eng., Cheju Nat'l Univ.) ;
- Sohn, Byung-Ki (Dept. of Elec. Eng., Kyungpook Nat'l Univ.)
- Published : 1988.11.01
Abstract
A pH-ISEFET microprobe for in vivo measurements has been fabricated by combining ISFET (SL-IIS) chip and capillary thin film reference electrode. A two-step TCE oxidation for the gate oxide layer and multilayer encapsulation using silicone rubber and epoxy were specially used for the improvement of the stability and temperature dependence of the ISFET's. The measured sensitivit, response time and temperature dependence of the pH-ISFET microprobes are 50 mV/pH, less than one second, and - 0.01 pH/
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