한국연소학회:학술대회논문집
- 한국연소학회 2014년도 제49회 KOSCO SYMPOSIUM 초록집
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- Pages.337-338
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- 2014
유독물질 질량분율 실시간 측정용 정전용량센서 제작
Fabrication of capacitance sensor for real time harmful substance mass fraction mesurement
초록
In this study, a method of using a capacitance sensor was investigated as a means to measure the mass fraction of a type of harmful substance. Using MEMS process, we developed a capacitance sensor and studied the real time mass fraction with harmful substance mixture liquid.