Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2011.02a
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- Pages.311-311
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- 2011
Microstructure and Corrosion Properties of TiNX Thin Films Prepared by High Density Plasma Reactive Magnetron Sputtering with Electromagnetic Field System
- Kim, Jeong-Hyeok (Department of Materials Science and Engineering, Pusan National University) ;
- Park, Ji-Bong (Department of Materials Science and Engineering, Pusan National University) ;
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Song, Pung-Geun
(Department of Materials Science and Engineering, Pusan National University)
- Published : 2011.02.09
Abstract
Keywords
- TiN;
- Electromagnetic field;
- Density plasma Reactive magnetron sputtering;
- Metallic biporlar plate;
- Corrosion