한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2010년도 제39회 하계학술대회 초록집
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- Pages.213-213
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- 2010
Al doped ZnO film on PET deposited by roll to roll vacuum coater for the flexible electronics
- Yang, Jeong-Do (Optoelectronic Materials Center, Korea Institute of Science and Technology) ;
- Park, Dong-Hee (Optoelectronic Materials Center, Korea Institute of Science and Technology) ;
- Yoo, Kyung-Hwa (Department of Physics, Yonsei University) ;
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Choi, Won-Kook
(Optoelectronic Materials Center, Korea Institute of Science and Technology)
- 발행 : 2010.08.18
초록
We investigated the RF sputtering conditions for the deposition of AZO (Al doped ZnO) transparent conducting film on PET using the roll to roll vacuum coater. AZO thin films, sputtered at the various RF powers and working pressures, were studied for their structural, electrical and optical properties.. From the X-Ray diffraction patterns, we calculated the lattice stress using the Bragg equation. The compressive stress tends to decrease with the increase in film thickness. AZO thin film with the thickness of 152nm (1400W, 0.4Pa) exhibit the resistivity of
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