Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2010.06a
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- Pages.4-4
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- 2010
Crystallization of IGZO thin film with spontaneously formed superlattice structure induced by Zno buffer layer
Zno 버퍼층을 이용한 자발적 초격자구조를 갖는 IGZO 박막의 결정화
- Seo, Dong-Kyu (SungKyunKwan University) ;
- Kong, Bo-Hyun (SungKyunKwan University) ;
- Cho, Hyoung-Koun (SungKyunKwan University)
- Published : 2010.06.16
Abstract
Single-crystalline IGZO (Indium-Gallium-Zinc oxide) was fabricated on c-sapphire substrate. Single crystal ZnO was used as a buffer layer, and post-annealing was treated in