한국정보디스플레이학회:학술대회논문집
- 2009.10a
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- Pages.1535-1537
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- 2009
Transparent Conductive AGZO-PET Film by Roll-to-Roll Sputter and Its Application to Resistive Type Touch Panel Fabrication
- Lee, Sang-Ju (Dept. of Polymer Science, Kyungpook Nat. Univ.) ;
- Lee, Sang-Mun (Advanced Display Manufacturing Research Center, Kyungpook Nat. Univ.) ;
- Lee, Yoon-Su (Advanced Display Manufacturing Research Center, Kyungpook Nat. Univ.) ;
- Kim, Tae-Hoon (Mobile Display Research Center, Kyungpook Nat. Univ.) ;
- Park, Lee-Soon (Dept. of Polymer Science, Kyungpook Nat. Univ.)
- Published : 2009.10.12
Abstract
High performance resistive type touch panel was fabricated on flexible polyethylene terephthalate (PET) substrates coated with Al- and Ga-codoped ZnO (AGZO) films. The AGZO films were deposited by roll-to-roll direct current magnetron sputter at room temperature. The AGZO thin films on PET substrates showed high transparency (> 85 % at 550 nm) and low sheet resistance (450