한국정보디스플레이학회:학술대회논문집
- 2009.10a
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- Pages.1430-1432
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- 2009
The effect of electro-annealing on the electrical properties of ITO film on colorless polyimide substrate
- Song, Jun-Cheol (Dept. of Polymer Science, Kyungpook National University) ;
- Park, Deok-Hun (Dept. of Polymer Science, Kyungpook National University) ;
- Park, In-Sung (Dept. of Polymer Science, Kyungpook National University) ;
- Shim, Shang-Hun (Dept. of Polymer Science, Kyungpook National University) ;
- Yoon, Keun-Byoung (Dept. of Polymer Science, Kyungpook National University)
- Published : 2009.10.12
Abstract
The effect of different annealing methods on the sheet resistance of indium tin oxide (ITO) on polyimide (PI) substrate has been investigated. As electro-annealing induced the predominant growth of crystallites of ITO thin films along (400) plane, the sheet resistance of ITO films that were electro-annealed for 2 mA at