마이크로기계 공진 센서의 유체-구조물 상호 작용 해석

Fluid-structure interaction analysis of micromechanical resonance sensor

A micromechanical resonance sensor detects the resonance frequency shift due to mass or adsorption induced surface stress change during molecular adsorption or interaction on its surface. The resonance sensor is surrounded by gas or liquid solution during operation. To study the resonance shift phenomena depending on its surrounding environment, fluid-structure interaction of the resonance sensor has been analyzed for the different fluid environment and boundary conditions using finite element analysis.