• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2009.10a
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• pp.309-313
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• 2009

A micromechanical resonance sensor detects the resonance frequency shift due to mass or adsorption induced surface stress change during molecular adsorption or interaction on its surface. The resonance sensor is surrounded by gas or liquid solution during operation. To study the resonance shift phenomena depending on its surrounding environment, fluid-structure interaction of the resonance sensor has been analyzed for the different fluid environment and boundary conditions using finite element analysis.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.447-447
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• 2011

We studied to detect the mass variation using micro mechanical resonator. For measuring the resonance frequency of the micro mechanical system, optical method using laser interference is selected. A simple resonator is prepared by attaching an AFM cantilever on the piezo stack. The piezo stack makes a the cantilever vibrated with its resonance frequency. To change the mass of the resonator, gold was evaporated on the cantilever. We measured how much resonance frequency was changed according to the amount of gold attached on cantilever. This resonator is able to perform the role of a mass sensor and has a resolution of the order of micrograms. The fabrication of the resonator and measurement setup for detecting the mechanical resonance will be introduced in this presentation.

• Proceedings of the KSME Conference
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• 2008.11a
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• pp.1767-1772
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• 2008

A microcantilever is a well-known MEMS structure for sensing bio-chemical molecules. When bio-chemical molecules are adsorbed on the microcantilever's surface, resonance frequency shift is generated. There are two issues in this phenomena. The first one is which one between mass change and surface stress change effects is more dominant on the resonance frequency shift. The second one is what will be the performance change when the boundary condition is changed from cantilevers to double clamped beams. We have studied the effect of surface stress change and compared it with that of mass change by using FEM analysis. Furthermore, for microstructures having different boundary conditions, we have studied Q-factor, which determines the detection limit of micro/nano mechanical sensors.