한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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- Pages.137-137
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- 2008
In-situ 도핑된 다결정 3C-SiC 박막의 전기적 특성
Electrical characteristics of In-situ doped polycrystalline 3C-SiC thin films
- Kim, Kang-San (School of Electrical Eng., University of Ulsan) ;
- Chung, Gwiy-Sang (School of Electrical Eng., University of Ulsan)
- 발행 : 2008.11.06
초록
In-situ doped polycrystalline 3C-SiC thin films were deposited by APCVD at