Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2008.11a
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- Pages.124-125
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- 2008
Charge trap characteristics with $Si_3N_4$ tmp layer thickness
$Si_3N_4$ trap layer의 두께에 따른 charge trap 특성
- Jung, Myung-Ho (Kwangwoon Univ.) ;
- Kim, Kwan-Su (Kwangwoon Univ.) ;
- Park, Goon-Ho (Kwangwoon Univ.) ;
- Kim, Min-Soo (Kwangwoon Univ.) ;
- Jung, Jong-Wan (Sejong Univ.) ;
- Jung, Hong-Bae (Kwangwoon Univ.) ;
- Cho, Won-Ju (Kwangwoon Univ.)
- Published : 2008.11.06
Abstract
The charge trapping and tunnelling characteristics with various thickness of