Proceedings of the KSME Conference (대한기계학회:학술대회논문집)
- 2008.11a
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- Pages.256-259
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- 2008
A Study On Fatigue Properties Of BeCu Thin Film For Probe Tip
프루브 팁용 BeCu 박막의 피로성질 연구
- Published : 2008.11.05
Abstract
An micro-probe tip must be manufactured using thin film to evaluate integrity of the semiconductor with narrow distance between pads. In this study, fatigue tests were performed for BeCu thin film which is used in micro-probe tip of semiconductor test machine. The thin film was manufactured by electro plating process, and the specimens were fabricated by wire-cut electric discharge method to make hour glass type specimen of