한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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- Pages.204-205
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- 2007
Sol-gel법으로 증착한 PLZT(9/65/35) 박막의 Self-seed layer에 따른 구조 및 특성
Investigation of Structural and Electrical properties of Self-seed layered PLZT(9/65/35) thin films deposited by sol-gel method
- Lee, Chul-Su (School of materials Science and Engineering, Pusan national Univ) ;
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Yoon, Ji-Eon
(School of materials Science and Engineering, Pusan national Univ) ;
- Cha, Won-Hyo (School of materials Science and Engineering, Pusan national Univ) ;
- Son, Young-Guk (School of materials Science and Engineering, Pusan national Univ)
- 발행 : 2007.06.21
초록
Self-seed 층을 이용한 PLZT(9/65/35), 강유전체 박막을 Sol-Gel 법을 이용해 Pt/Ti/