한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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- Pages.202-203
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- 2007
Pt 하부전극 후열처리 온도에 따른 SBT 박막의 전기적 특성평가
The electrical properties of SBT thin films according to various post-annealing of Pt bottom electrode
- Cha, Won-Hyo (School of Materials Science and Engineering, Pusan National University) ;
- Yoon, Ji-Eon (School of Materials Science and Engineering, Pusan National University) ;
- Lee, Chul-Su (School of Materials Science and Engineering, Pusan National University) ;
- Hwang, Dong-Hyun (School of Materials Science and Engineering, Pusan National University) ;
- Son, Young-Gook (School of Materials Science and Engineering, Pusan National University)
- 발행 : 2007.06.21
초록
Ferroelectric SBT(