대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)

대한전기학회 (The Korean Institute of Electrical Engineers)
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자기정렬에 의한 평판전극 마이크로미러 어린이의 설계와 제작

Design and Fabrication of Self-aligned Parallel-plate Type Micromirror Array

  • 유병욱 (서울대학교 전기컴퓨터공학부) ;
  • 김민수 (서울대학교 전기컴퓨터공학부) ;
  • 진주영 (서울대학교 전기컴퓨터공학부) ;
  • 전진아 (이화여자대학교 물리학과) ;
  • 박재형 (이화여자대학교 물리학과) ;
  • 김용권 (서울대학교 전기컴퓨터공학부)
  • Yoo, Byung-Wook (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Kim, Min-Soo (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Jin, Joo-Young (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Jeon, Jin-A (Department of Physics, Ewha Womans University) ;
  • Park, Jae-Hyong (Department of Physics, Ewha Womans University) ;
  • Kim, Yong-Kweon (School of Electrical Engineering and Computer Science, Seoul National University)
  • 발행 : 2007.11.02
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초록

We present an one-axis parallel-plate type of bulk micromachined torsional micromirror array with single crystalline silicon (SCS) fabricated on the glass substrate. Structurally, bottom electrodes (amophous silicon) in this mirror are DRIEed along the aluminum mirror patterns on SCS, which are self-aligned with mirror plates. Tracing the history of the micromirror study, we found that few papers have been published on research for uniform driving voltages based upon the tilting direction. If there is a slight misalignment during anodic bonding between top (mirror plate) and bottom electrodes, the non-uniformity of driving voltage will be led depending on two different tilting direction. This paper discusses how much the pull-in voltages can be different due to misalignment between two electrodes. Moreover, We achieve uniform pull-in voltage regardless of misalignments in photolithography and anodic-bonding between two individual layers.

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