혈전분해 응용을 위한 압전형 마이크로 외팔보의 제작 및 실험

Fabrication and Experiment of Piezoelectric Micro Cantilever Applicable to Thrombolysis

  • 백건훈 (서울대학교 전기 컴퓨터 공학부) ;
  • 서영태 (서울대학교 전기 컴퓨터 공학부) ;
  • 방용승 (서울대학교 전기 컴퓨터 공학부) ;
  • 김종만 (서울대학교 전기 컴퓨터 공학부) ;
  • 김성현 (분당서울대학교병원 진단방사선과) ;
  • 김용권 (서울대학교 전기 컴퓨터 공학부)
  • Baek, Kun-Hoon (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Seo, Young-Tai (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Bang, Yong-Seung (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Kim, Jong-Man (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Kim, Sung-Hyun (Diagnostic Radiology, Seoul National University Bundang Hospital) ;
  • Kim, Yong-Kweon (School of Electrical Engineering and Computer Science, Seoul National University)
  • 발행 : 2007.11.02

초록

This paper describes a resonant driving piezoelectric micro cantilever practicable to ultrasound thrombolysis device for the treatment of ischemic stroke. The proposed piezoelectric cantilever was designed to be a unimorph structure of Si/$SiO_2$/Ti/Pt/PZT/Pt, and fabricated by top-down sequence etching process. The red blood cell (RBC) lysis experiment was carried out to confirm the usability of the proposed cantilever. Total 87.76 % of RBCs were ruptured using the ultrasound generated by up-down actuations of the fabricated cantilever with AC voltage having the frequency of 19.36 Hz and the magnitude of $30V_{p-p}$.

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