Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2007.11a
- /
- Pages.408-409
- /
- 2007
Electrical Properties of V-I Curve of p-ZnO:Al/n-ZnO:Al Junction Fabricate by RF Magnetron Sputtering
- Jin, Hu-Jie (Wonkwang Univ. School of Electrical Electronic and Information Engineering) ;
- So, Soon-Jin (Knowledge On Semiconductor Inc.) ;
- Song, Min-Jong (Kwangju Health Coll.) ;
- Park, Choon-Bae (Wonkwang Univ. School of Electrical Electronic and Information Engineering)
- Published : 2007.11.01
Abstract
Al-doped p-type ZnO films were fabricated on n-Si (100) and homo-buffer layers in pure oxygen at