한국소음진동공학회:학술대회논문집 (Proceedings of the Korean Society for Noise and Vibration Engineering Conference)
- 한국소음진동공학회 2007년도 춘계학술대회논문집
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- Pages.677-682
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- 2007
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- 1598-2548(pISSN)
정밀 스테이지의 기구 동역학 해석
Kinematics and Dynamics Analysis of Precision stage
- 발행 : 2007.05.10
초록
Recently, a precision stage is widely used in the fields of the nano technology. In this paper, the precision stage which consists of linear motor, vision system, light source system and controller, is designed and developed for nano imprint machine. Stiffness design considering resonance frequency is important for the precision stage. A virtual machine simulation is useful for machine development the early design stage. Kinematic and dynamic simulations of XYZ stage are performed. To consider the resonance frequency and vibration effects flexible multibody dynamics are utilized with FE modeling of the structural components.
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