Synthetic-heterodyne interferometry for measuring extremely small amplitude of mechanical vibrations

미소 진폭 기계진동의 Synthetic-heterodyne 간섭측정에 대한 연구

On the homodyne interferometers, high pass filter(HPF) is usually used to remove the electrical noise in the interferent signal. Heterodyne interferometer has modulating frequency is shifted in the frequency region where the electrical noise effect is minimized by HPF effect. However, on the homodyne interferometer, the interferent DC-component of homodyne interferometer is unfortunately eliminated by using a HPF because its shifted frequency does not exist. Moreover, this effect is more serious the vibration amplitude is smaller. So, when unstable interferent signals via HPF are demodulated, a velocity is distorted. In this work, the mathematical explanation for the distortion of the homodyne interferent signal using the HPF is given. New synthetic heterodyne LDV based on the homodyne interferometer by exciting the reference mirror is proposed for the cancellation of the distortion. The optimum excitation condition of the mirror to compensate the distortion is discussed. The numerical simulation using the commercial MATLAB code is provided to show the effect of the proposed synthetic heterodyne LDV. The experimental results are also given and the effect of the proposed LDV is discussed.