한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)
- 한국정밀공학회 2006년도 춘계학술대회 논문집
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- Pages.157-158
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- 2006
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- 2005-8446(pISSN)
나노 실리카분말의 충진효과를 이용한 극미세 3차원 세라믹 구조물 정밀화
Improvement of precision of three-dimensional ceramic microstructures employing silica nanoparticle-mixed precursor
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Lim T.W.
(Mech. Eng. Dept. KAIST) ;
- Park S.H. (Mech. Eng. Dept. KAIST) ;
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Yang D.Y.
(Mech. Eng. Dept. KAIST) ;
- Pham Tuan Anh (Fine Chemicals Eng. & Chem. Dept., CNU) ;
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Kim D.P.
(Fine Chemicals Eng. & Chem. Dept., CNU)
- 발행 : 2006.05.01
초록
A novel nanofabrication process has been developed using two-photon crosslinking (TPC) for the fabrication of three-dimensional (3D) SiCN ceramic microstructures applicable to high functional 3D devices, which can be used in harsh working environments requiring a high temperature, a resistance to chemical corrosion, as well as tribological properties. After sequential processes: TPC and pyrolysis, 3D ceramic microstructures are obtained. However, large shrinkage due to low-ceramic yield during the pyrolysis is a serious problem to be solved in the precise fabrication of 3D ceramic microstructures. In this work, silica nanoparticles were employed as a filler to reduce the amount of shrinkage. In particular, the ceramic microstructures containing 40 wt% silica nanoparticles exhibited relatively isotropic shrinkage owing to its sliding free from the substrate during pyrolysis.
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