한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
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- Pages.172-173
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- 2006
Ferroelectric properties of BLT films deposited on $ZrO_2$ Si substrates
- Park, Jun-Seo (Department of Electrical and Computer Engineering, University of Seoul) ;
- Lee, Gwang-Geun (Department of Electrical and Computer Engineering, University of Seoul) ;
- Park, Kwang-Hun (Department of Electrical and Computer Engineering, University of Seoul) ;
- Jeon, Ho-Seung (Department of Electrical and Computer Engineering, University of Seoul) ;
- Im, Jong-Hyun (Department of Electrical and Computer Engineering, University of Seoul) ;
- Park, Byung-Eun (Department of Electrical and Computer Engineering, University of Seoul) ;
- Kim, Chul-Ju (Department of Electrical and Computer Engineering, University of Seoul)
- 발행 : 2006.11.09
초록
Metal-ferroelectric-insulator-semiconductor (MFIS) structures with