한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
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- Pages.170-171
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- 2006
유기물 박막에서 일어나는 친핵성 반응에 대한 연구
Study on the nucleophilic reaction on Orgniac Thin Films
- Oh, Teresa (Cheongju Univ.) ;
- Kim, Hong-Bae (Cheongju Univ.)
- 발행 : 2006.11.09
초록
The chemical shift of SiOC film was observed according to the flow rate ratio. SiOC film has the broad main band of