Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2006.11a
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- Pages.99-100
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- 2006
Analysis of one- and two-dimensional boron distribution in implanted $BF_2$ silicon
실리콘에 $BF_2$ 로 이온주입후에 Boron 이온의 일차원 및 이차원적인 분포해석
- Jung, Won-Chae (Department of Electronic Engineering, Kyonggi University)
- 정원채 (경기대학교 전자공학과)
- Published : 2010.04.01
Abstract