한국신재생에너지학회:학술대회논문집
- 한국신재생에너지학회 2006년도 추계학술대회
- /
- Pages.425-428
- /
- 2006
상변화를 이용한 열공압형 마이크로 펌프용 액츄에이터 성능에 관한 연구
A study on the Thermopneumatic Actuator with Phase Change for Micro Pump
초록
Recently, Direct Methanol Fuel Cell (DMFC) for portable devices has been received much attention because DMFC has a possibility of higher energy density than electrical batteries and smaller size than other fuel cells. This paper presents the fabrication and test of a thermopneumatic microactuator with a phase change for DMFC. A microactuator consists of an inlet an outlet a chamber, a heater and a sensor of resistance temperature detector(RTD). The micoractuator is fabricated by the spin-coating process, the lithograph process, the deep RIE process and so on. The total size of microactuator is