• Proceedings of the KIEE Conference
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• 2005.11a
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• pp.116-118
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• 2005

열공압 방식으로 동작하는 마이크로 펌프와 밸브가 집적된 (polydimethylsiloxane)PDMS 미 세 유체 시스템을 제작하였다. 본 실험에서 제안한 미세 유체 시스템은 PDMS 마이크로 채널, PDMS membrane, 열공압 챔버, indium tin oxide(ITO) 히터로 구성되어 있다. 마이크로 펌프의 경우 가해주는 펄스 전압의 변화를 통해 유속을 최적화 하였고 마이크로 밸브의 경우 가해주는 직류 전압을 변화시켜 유체의 흐름을 제어할 수 있었다. 미세 유체 시스템의 최적화된 조건은 마이크로 펌프의 경우 duty 4%와 주파수 4Hz에서 최대 pumping rate을 나타냈고 그때의 pumping rate 68nl/min이었다. 마이크로 밸브의 유체를 closing 전력은 450mW이었다.

• Proceedings of the KIEE Conference
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• 2003.07c
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• pp.1929-1931
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• 2003

본 연구에서 제안하는 마이크로 밸브는 열공압 방식으로 구동되고 제작비용이 저렴한 indium tin oxide (ITO) 및 polydimethylsiloxane (PDMS)로 제작되었다. 제안된 마이크로 밸브의 구조는 ITO 히터, SU-8 층, PDMS membrane, 그리고 PDMS 채널로 구성되어 있다. 제작된 열공압 구동기의 PDMS membrane의 변위는 현미경의 초점 거리의 변화로 측정하였으며 히터에 160mW 전력 인가 시 변위는 대략 $132{\mu}m$이다. 마이크로 밸브의 히터에 인가 전력에 따른 유량측정은 DI water를 사용하여 측정하였고 inlet 압력은 1.2kpa를 인가하여 측정하였다. 히터 인가 전력이 영일 경우 채널 폭이 $200{\mu}m$와 $400{\mu}m$인 마이크로 밸브의 유량은 각각 대략 $36{\mu}{\el}$/min과 $110{\mu}{\el}$/min 이었다. 채널 폭이 $200{\mu}m$와 $400{\mu}m$인 마이크로 밸브의 유량은 히터 인가 전력이 각각 70mW와 160mW에서 영이 되었다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2009.06a
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• pp.369-370
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• 2009

• Transactions of the Korean Society of Mechanical Engineers A
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• v.32 no.9
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• pp.720-727
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• 2008

Microfluidic single chip integrating thermopneumatic micropump and micro check valve are developed. The micropump and micorvalve are made of biocompatible materials, glass and PDMS, so as to be applicable to the biochip. By using the passive-type check valve, backward flow and fluid leakage are blocked and flow control is stable and precise. The chip is composed of three PDMS layers and a glass substrate. In the chip, flow channel and pump chamber were made on the PDMS layers by the replica molding technique and pump heater was made on the glass substrate by Cr/Au deposition. Diameter of the pump chamber is 7 mm and the width and depth of the channel are 200 and $180{\mu}m$, respectively. The PDMS layers chip and the heater deposited glass chip are combined by a jig and a clamp for pumping operation, and they are separable so that PDMS chip is used as a disposable but the heater chip is able to be used repeatedly. Pumping performance was simulated by CFD software and investigated experimentally. The performance was the best when the duty ratio of the applied voltage to the heater was 33%.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.17 no.7
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• pp.642-648
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• 2005

This study has been conducted to investigate the thermopneumatic and flow characteristics of diffuser/nozzle based thermopneumatic micropumps. In this study, a transient three-dimensional numerical analysis using FSI (Fluid-Structure Interaction) model has been employed to analyze the effects of the interaction between the membrane and two fluids (air and water) in the thermopneumtic micropump. The transient temperature and pressure in the cavity, the transient displacements of the membrane and the net flow rate of the micropump have been closely calculated for the frequency of 1 Hz. It has been found that the difference of the flow rates at the inlet and outlet is larger in the cooling period than in the heating period and that the duty ratio is very important in association with pump performance because the temperature in the cavity ascends drastically in the heating period and descends slowly in the cooling period. This study can be regarded as fundamental understandings for the design and analysis of thermopneumatic micropumps.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.33 no.10
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• pp.778-782
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• 2009

Recently, we developed a simple thermopneumatic micropump having neither a membrane nor a valve. This micropump discharges liquid by a thermopneumatic pressure and refill by a capillary attraction. In case of the micropump driven by the capillary attraction, the flow characteristic depends mainly on the geometry of the micropump. In this paper, we investigated the influence of the geometry of the micropump on the performance of the micropump to illustrate the properness of the micropump shape. We analyzed the micropump characteristics of six types having different geometries by FVM simulation with a commercial CFD tool. Also we fabricated the micropumps with PDMS and glass by micromachining, and tested the performances. The simulation and the test results illustrate that the discharge volume and the discharge time depend on the chamber volume. The expansion angle of the inlet channel location has influence on the refill time, while the front air channel direction has influence on the backward flow loss.

• 한국신재생에너지학회:학술대회논문집
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• 2006.11a
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• pp.425-428
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• 2006

Recently, Direct Methanol Fuel Cell (DMFC) for portable devices has been received much attention because DMFC has a possibility of higher energy density than electrical batteries and smaller size than other fuel cells. This paper presents the fabrication and test of a thermopneumatic microactuator with a phase change for DMFC. A microactuator consists of an inlet an outlet a chamber, a heater and a sensor of resistance temperature detector(RTD). The micoractuator is fabricated by the spin-coating process, the lithograph process, the deep RIE process and so on. The total size of microactuator is $20{\times}20{\times}0.53mm^3$. When the current is applied, the heater heats liquid in chamber. As a result the liquid vaporizes. The response of temperature in the chamber was measured using thermocouple The changed temperature is $3^{\circ}C$ for 5 sec at 0.032W.

• Proceedings of the KIEE Conference
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• 2004.07c
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• pp.2099-2101
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• 2004

본 연구에서 제안하는 마이크로 시스템은 열공압 방식으로 구동되고 제작비용이 저렴한 indium tin oxide (ITO) 및 polydimethylsiloxane (PDMS)로 제작되었다. 제안된 마이크로 밸브와 마이크로 펌프의 구조는 ITO 히터, SU-8 층, PDMS membrane, 그리고 PDMS 채널로 구성 되어 있다. 제안된 마이크로 펌프와 마이크로 밸브는 제작 공정 및 구조가 간단하고 값이 저렴하며, 마이크로 펌프와 마이크로 밸브를 같은 기판 위에 쉽게 직접화할 수 있는 장점을 가진다. 마이크로 밸브의 유량은 채널 폭에 비례하며 밸브가 closing 되는 전력은 채널의 폭과 상관없이 100 mW이다. 마이크로밸브의 ITO 히터의 온-오프에 따라 유량이 매우 잘 제어되었다. 제안된 마이크로 펌프의 경우, 히터의 인가 펄스 전압이 증가함에 따라 유량은 선형적으로 비례 증가함을 관찰할 수 있다. 마이크로 펌프의 최대 유량은 펄스 전압과 duty 비가 55V와 10%일 때 6 Hz에서 78 nl/min이 측정 되었다.

• Proceedings of the KSME Conference
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• 2007.05a
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• pp.1433-1438
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• 2007

Characteristics of a phase change type micro actuator have been studied. The micro actuator has been designed for a micro-pump in an active direct methanol fuel cell(DMFC), consisting of an actuating chamber, a membrane, an electric heater, and a sensor of resistance temperature detector (RTD). In the present study, researches have been focused on the response of the actuator to control algorithm of the heater. The experiments demonstrated that the displacement of the membrane increase with temperature variation which is a function of applied voltage, duty ratio, and operating frequency of heating. The results also showed that operation of the actuator with high voltage at small duty of heating is more efficient than the same power consumption of heating with low voltage at large duty.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.53 no.4
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• pp.231-236
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• 2004

A normally open thermopneumaticc-actuated microvalve has been fabricated and their properties are investigated. The advantages of the proposed microvalve are of the low cost fabrication process and the transparent optical property using polydimethylsiloxane (PDMS) and indium tin oxide (ITO) glass. The fabricated microvalves with in-channel configuration are easily integrated with other microfluidic devices on the same substrate. The fabrication process of thermopneumatic-actuated microvalvesusing PDMS is very simple and its performance is very suitable for a disposable lab-on-a-chip. The PDMS membrane deflection increases and the flow rates of the microchannel with microvalvels decrease as the applied power to the ITO heater increases. The powers at flow-off are dependent on the membrane thickness and the applied inlet pressure but are independent of the channel width of microvalves. The flow rate is well controlled by the switching function of ITO heater and the closing/opening times are around 20 sec and 25 sec, respectively.