대한설비공학회:학술대회논문집 (Proceedings of the SAREK Conference)
- 대한설비공학회 2006년도 하계학술발표대회 논문집
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- Pages.988-992
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- 2006
반도체 클린룸용 직접분무식 에어와셔 시스템의 성능평가실험
An Experiment on Performance Evaluation of a Direct Atomization Type Air Washer System for Semiconductor Clean Rooms
- Yeo, Kuk-Hyun (Aerosol-Contamination Control Laboratory, KITECH) ;
- Yoo, Kyung-Hoon (Aerosol-Contamination Control Laboratory, KITECH) ;
- Tae, Kyung-Eung (Research & Department Center, Daehan PNC)
- 발행 : 2006.06.21
초록
In recent semiconductor manufacturing clean rooms, air washers are used to remove airborne gaseous contaminants such as