대한설비공학회:학술대회논문집 (Proceedings of the SAREK Conference)

대한설비공학회 (The Society of Air-Conditioning and Refrigerating Engineers of Korea)
권호 표지

초소형 냉동시스템의 응용을 위한 마이크로 증기 압축기의 개발 및 성능에 관한 연구

A Study on the Micro Vapor Compressor based on Microfabrication Process for the Application to the Micro Miniature Refrigeration System

  • 윤재성 (서울대학교 대학원 기계항공공학부) ;
  • 최종원 (서울대학교 대학원 기계항공공학부) ;
  • 김민수 (서울대학교 기계항공공학부)
  • Yoon, Jae-Sung (School of Mechanical and Aerospace Engineering, Seoul National University) ;
  • Choi, Jong-Won (School of Mechanical and Aerospace Engineering, Seoul National University) ;
  • Kim, Min-Soo (School of Mechanical and Aerospace Engineering, Seoul National University)
  • 발행 : 2006.06.21
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초록

In this study, a micro vapor compressor has been designed, fabricated and tested. The micro vapor compressor was made of silicon substrates and fabricated by micromachining process. The compressor is driven by a piezoelectric actuator which is widely used in microfluidic systems because of its strong force and rapid response. The actuator is a bimorph structure which consists of a silicon membrane and a piezoelectric ceramic film. A simulation work was conducted on the performance characteristics of the compressor. The simulation investigated the flow rate variation under various back pressure conditions. Experimental works were carried out on the operation of a compressor and the test results were compared with the simulation results.

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