한국소음진동공학회:학술대회논문집 (Proceedings of the Korean Society for Noise and Vibration Engineering Conference)
- 한국소음진동공학회 2005년도 추계학술대회논문집
- /
- Pages.879-882
- /
- 2005
- /
- 1598-2548(pISSN)
원자 현미경용 샘플 스캐너의 개발
Development of a Sample Scanner for Atomic Force Microscope
- 발행 : 2005.11.01
초록
This paper shows a method for design of the nano-positioning planar scanner used in the scanning probe microscope. The planar scanner is composed of flexure guides, piezoelectric actuators and feedback sensors. In the design of flexure guides, the Castigliano's theorem was used to find the stiffness of the guide. The motion amplifying mechanism was used in the piezoelectric actuator to achieve a large travel range. We found theoretically the travel range of the total system and verified using the commercial FEM(Finite element method) program. The maximum travel range of the planar scanner is above than 140
키워드