The measurement of nano properties using nanoindentation

나노인덴테이션을 이용한 나노물성 측정

The nanoindentation technique is widely used to investigate the mechanical properties of nano-microscale materials. The nanoindentation method for assessing mechanical properties at low loads and shallow depths is already well established fur the characterization of thin films as well as bulk materials. In this study, we evaluated residual stress in DLC and Au thin films usign nanoindentation technique with a new stress-relaxation model. Moreover, We suggest a composite hardness equation and quantify the magnitude of hardness increase by using an equation based on the interface hardness and the interface thickness, derived by comparing results derived from this equation and those determined in nanoindentation tests. Finally, We present an indentation size effect (ISE) model that extends the available contact depth for ISE application down to several tens of nanometers by considering the tip bluntness effect.