Proceedings of the Korean Institute of Information and Commucation Sciences Conference (한국정보통신학회:학술대회논문집)
- Volume 9 Issue 2
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- Pages.311-315
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- 2005
The Improvements of FBAR Devices performances by Thermal Annealing Methods
- Mai, Linh (School of Engineering, Information and Communications University) ;
- Song, Hae-Il (School of Engineering, Information and Communications University) ;
- Le, Minh-Tuan (School of Engineering, Information and Communications University) ;
- Pham, Van-Su (School of Engineering, Information and Communications University) ;
- Yoon, Gi-Wan (School of Engineering, Information and Communications University)
- Published : 2005.10.28
Abstract
In this paper, we emphasize the advantage of thermal annealing treatments for improvement characteristics of film bulk acoustic resonator (FBAR) devices. The FBAR devices were fabricated on multi-layer thin films, namely, Bragg reflectors. Sintering and/or annealing processes were applied in our experiments. The measurements confirm once again a considerable improvement of return loss
Keywords
- Film bulk acoustic resonator (FBAR);
- Bragg reflector;
- Thermal annealing;
- Return loss (S11);
- Q-factor;
- Inter-fabrication annealing;
- post-annealing