Proceedings of the Korean Society of Machine Tool Engineers Conference (한국공작기계학회:학술대회논문집)
- 2005.05a
- /
- Pages.40-44
- /
- 2005
Development of manipulator for handling micro components in vacuum
진공용 초소형 제품조작을 위한 매니퓰레이터 제작
Abstract
Recently PZT is used in ultra precision mechanism field. PZT itself has a small driving range although it has a high resolution. Many methods, such as inchworm, impact driving, inertial sliding method, etc., have been applied for moving range expansion. In this study, a new actuating mechanism for rotational motion with two driving PZT is proposed. The Fixed-Fixed beam support is applied for compensation of the difference in driving force between expansion and contraction of PZT. The behavior and design parameters of the proposed mechanism are analyzed for improving performance.