대한기계학회:학술대회논문집 (Proceedings of the KSME Conference)
- 대한기계학회 2004년도 춘계학술대회
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- Pages.240-245
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- 2004
나노 코팅재 TiN 의 마이크로 인장 특성 평가
Evaluation of Micro-Tensile Properties for Nano-coating Material TiN
초록
Tensile properties of hard coating material, TiN, were evaluated using micro-tensile testing system. TiN has been known as a hard coating material commonly used today. Micro-tensile testing system consisted of a micro tensile loading system and a micro-ESPI(Electronic Speckle Pattern Interferometry) system. Micro-tensile loading system had a maximum load capacity of 500mN and a resolution of 4.5 nm in stroke. TiN thin film
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