Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2004.07b
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- Pages.1033-1036
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- 2004
Effect of hydrogen on the photoluminescence of Silicon nanocrystalline thin films
실리콘 나노결정 박막에서 수소 패시베이션 효과
- Jeon, Kyung-Ah (Yonsei University) ;
- Kim, Jong-Hoon (Yonsei University) ;
- Kim, Gun-Hee (Yonsei University) ;
- Lee, Sang-Yeol (Yonsei University)
- Published : 2004.07.05
Abstract
Si nanocrystallites thin films on p-type (100) Si substrate have been fabricated by pulsed laser deposition using a Nd:YAG laser. After deposition, samples were annealed at the temperatures of 400 to