Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Characterization of Interdigitated Capacitors for Integrated Circuit Application

집적회로 응용을 위한 빗살형 캐패시터의 특성연구

  • Kim, Kil-Han (Department of Electrical and Electronic Engineering Yonsei University) ;
  • Lee, Kyu-Bok (Korean Electronics Technology Institute) ;
  • Kim, Jong-Kyu (Korean Electronics Technology Institute) ;
  • Yun, Il-Gu (Department of Electrical and Electronic Engineering Yonsei University)
  • Published : 2004.07.05
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Abstract

The characterization of interdigitated capacitors was investigated. The test structures are manufactured by low temperature co-fired ceramic(LTCC) process and their s-parameters were measured. The optimized equivalent circuit models for test structures were obtained using the partial element equivalent circuit(PEEC) method. Predictive modeling was performed on different test structures using optimized parameters to verify the circuit models. From this result, the manufacturability on the process can be improved through the predictive modeling for the characteristics of interdigitated capacitors.

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