한국반도체및디스플레이장비학회:학술대회논문집 (Proceedings of the Korean Society Of Semiconductor Equipment Technology)
- 한국반도체및디스플레이장비학회 2004년도 춘계학술대회 발표 논문집
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- Pages.263-267
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- 2004
압축응력인가에 따른 적층 액츄에이터의 특성
초록
This study presents the combined effect of electric field application and mechanical compressive stress loading on deformation in a multilayer ceramic actuator, designed with stacking 0.2(
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