Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2004.10a
- /
- Pages.552-555
- /
- 2004
- /
- 2005-8446(pISSN)
Nano-wear Characteristics of Silicon Probe Tip for Probe Based Data Storage Technology
탐침형 정보저장 기술을 위한 실리콘 탐침의 나노 마멸 특성에 관한 연구
Abstract
The reliability issue of the probe tip/recording media interface is one of the most crucial concerns in the Atomic Force Microscope (AFM)-based recording technology. In this work, the tribological characteristics of the probe/media interface were investigated by performing wear tests using an AFM. The ranges of applied normal load and sliding velocity for the wear test were 10 to 50nN and 2 to 20