Design of a Precession Controller of a Magnetic Bearing System for a High Vacuum TMP

고진공 터보 분자 펌프용 자기베어링 시스템의 후방향 원추모드(Precession) 제어기 설계

The active magnetic bearing system for a TMP consists of four couples of magnets, five gap sensors with its amplifiers and a digital PID controller. For stabilizing and providing damping, digital PID controller is applied for each control axes and the inter-axis cross feedback controller is also applied to suppress low frequency vibration caused by gyroscopic moment of the rotor. Therefore in this paper, a digital controller of magnetic bearing for a TMP is design and examined.