한국공작기계학회:학술대회논문집 (Proceedings of the Korean Society of Machine Tool Engineers Conference)
- 한국공작기계학회 2004년도 춘계학술대회 논문집
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- Pages.490-493
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- 2004
집속 이온빔에 의한 3차원 가공 시스템
3 Dimensional Machining System using Focused ion Beam
초록
There is great difficulty in machine below 10 micrometers by conventional machining methods, such as micro-EDM. However, ultra micro machining using focused ion beam(FIB) is able to machine to 50 nanometers. Bie & moulds techniques are better than one-to-one machining techniques in regards to production costs in the mass production of ultra size structures. Also, it is advantageous to machine die & moulds to the 10 micrometers level by FIB technique rather than other techniques. It is difficult to machine the three dimensional machining, such as micro lens, using FIB system because of their machining characteristics. In this paper, three dimensional machining techniques were properly introduced, and also experiments showed effectiveness of their techniques.
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