An Experimental Study on Bubble Growth and Temperature Change on Microheater

마이크로 히터에서의 기포성장과 온도변화에 관한 실험적 연구

Bubble growth on microheater has been experimentally investigated in this study. The experiment was performed using platinum microheaters having dimensions of 300 ${\mu}m$ or 50 ${\mu}m$ in length, 20 ${\mu}m$ or 5 ${\mu}m$ in width, and $0.2{\pm}0.01$ ${\mu}m$ in thickness. A high speed video camera was used to observe bubble growth at 2,000 frames per second. Microheater temperature was measured at the rate of 300 Hz. with a data acquisition system. Bubble nucleation frequency increased with working fluid temperature. Although the slope of temperature drop was similar in all cases, the magnitude of temperature drop was different. The temperature profiles and the high speed camera images were combined to explain temperature drop.