Segmentation Algorithm for Wafer ID using Active Multiple Templates Model

This paper presents a method to segment wafer ID marks on poor quality images under uncontrolled lighting conditions of the semiconductor process. The active multiple templates matching method is suggested to search ID areas on wafers and segment them into meaningful regions and it would have been impossible to recognize characters using general OCR algorithms. This active template model is designed by applying a snake model that is used for active contour tracking. Active multiple template model searches character areas and segments them into single characters optimally, tracking each character that can vary in a flexible manner according to string configurations. Applying active multiple templates, the optimization of the snake energy is done using Greedy algorithm, to maximize its efficiency by automatically controlling each template gap. These vary according to the configuration of character string. Experimental results using wafer images from real FA environment are presented.