Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Characterization of Optical Design for Optical MEMS

Optical MEMS 응용을 위한 광학 설계

  • Eom, Yong-Sung (Intrgrated Optical Module Team, Electronics and Telecommunication Research Institute) ;
  • Park, Heung-Woo (Intrgrated Optical Module Team, Electronics and Telecommunication Research Institute) ;
  • Park, Jun-Hee (Intrgrated Optical Module Team, Electronics and Telecommunication Research Institute) ;
  • Choi, Byung-Seok (Intrgrated Optical Module Team, Electronics and Telecommunication Research Institute) ;
  • Lee, Jong-Hyun (Intrgrated Optical Module Team, Electronics and Telecommunication Research Institute) ;
  • Yun, Ho-Kyung (Intrgrated Optical Module Team, Electronics and Telecommunication Research Institute) ;
  • Choi, Kwang-Seung (Intrgrated Optical Module Team, Electronics and Telecommunication Research Institute) ;
  • Moon, Jong-Tae (Intrgrated Optical Module Team, Electronics and Telecommunication Research Institute)
  • 엄용성 (한국전자통신연구원 집적광모듈팀) ;
  • 박흥우 (한국전자통신연구원 집적광모듈팀) ;
  • 박준희 (한국전자통신연구원 집적광모듈팀) ;
  • 최병석 (한국전자통신연구원 집적광모듈팀) ;
  • 이종현 (한국전자통신연구원 집적광모듈팀) ;
  • 윤호경 (한국전자통신연구원 집적광모듈팀) ;
  • 최광성 (한국전자통신연구원 집적광모듈팀) ;
  • 문종태 (한국전자통신연구원 집적광모듈팀)
  • Published : 2003.04.19
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Abstract

As one of the core technologies in the field of the optical communication with WDM, the optical cross connector with movements of micro mirrors is getting important day by day. The packaging structure of 2-dimensional NxN MOEMS switch should be determined by the harmonization of the following items such as the geometrical compatability between optical and structural components, the characteristics of optical input and output parts with device, and the electrical performance for the operation of micro mirrors. Therefore, the packaging process could be defined as the integrated technology completed by the optical and electrical science and the material science for the understanding of its thermo-mechanical properties with packaging materials. In the present study, the harmonization between the optical and structural components as well as the optical characteristics of lens system used will be investigated.

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