한국반도체및디스플레이장비학회:학술대회논문집 (Proceedings of the Korean Society Of Semiconductor Equipment Technology)
- 한국반도체및디스플레이장비학회 2003년도 춘계학술대회 발표 논문집
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- Pages.74-79
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- 2003
퍼지 논리를 이용한 웨이퍼의 사이즈 추정 알고리즘
초록
This paper is concerned with the estimation of a wafer part in grasping system. The estimation of a wafer size in grasping system is very important because a wafer must be placed in accurate position. The accurate information of a wafer size should be forward to Robot in order to place a wafer in accurate position. So in this paper, we decide the size of a wafer with Fuzzy Logic and consider the possibility of this method by simulation.
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