Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2003.06a
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- Pages.268-271
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- 2003
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- 2005-8446(pISSN)
The performance improvement of the volumetric interferometer with multi-CCDs
다중 CCD를 이용한 부피 간섭계의 성능 개선
Abstract
The Volumetric Interferometer using two spherical wavefronts emitted from the ends of two single mode fibers has been suggested to measure 3-dimensional absolute coordinates. In this paper, we try to improve the performance of the volumetric interferometer using multi-CCDs. We get coordinates matching matrixes between CCDs and can obtain more information in the space with multi-CCDs. Also we find out the best arrangement of multi-CCDs by computer simulations. In the simulation we can know that it will be better to increase the distance between CCDs to improve performance. For the performance test, we do a repeatability test, a comparison test with 2-D stage and the self-calibration using artifact.
Keywords