대한전자공학회:학술대회논문집 (Proceedings of the IEEK Conference)
- 대한전자공학회 2003년도 하계종합학술대회 논문집 II
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- Pages.679-682
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- 2003
Capacitance - Voltage 방법을 이용한 MOSFET의 유효 채널 길이 추출
Extracting the Effective Channel Length of MOSFET by Capacitance - Voltage Method.
초록
Improvement in MOS fabrication technology have led to high-density high-performance integrated circuits with MOSFET channel lengths in the sub-micron range. For devices of the size, transistor characteristics become highly sensitive to effective channel length. We propose a new approach to extract the effective channel length of MOSFET by Capacitance-Voltage (C-V) method. Gate-to-Source, Drain capacitance (
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