한국표면공학회:학술대회논문집 (Proceedings of the Korean Institute of Surface Engineering Conference)
- 한국표면공학회 2003년도 추계학술발표회초록집
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- Pages.58-58
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- 2003
Influence of sputtering parameter on the properties of silver-doped zinc oxide sputtered films
- S. H. Jeong (Sungkyunkwan University) ;
- Lee, S. B. (Sungkyunkwan University) ;
- J.H. Boo (Sungkyunkwan University)
- 발행 : 2003.10.01
초록
Silver doped ZnO (SZO) films were prepared by rf magnetron sputtering on glass substrates with extraordinary designed ZnO target. With the doping source for target, use AgNO