Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2002.11a
- /
- Pages.546-547
- /
- 2002
Waveguides Fabrication for Optical Integrated Devices Application on Relaxor-ferroelectric $Pb(Mg_{1/3}Nb_{2/3})O_{3}-PbTiO_3$ Single Crystal
완화형 강유전체$Pb(Mg_{1/3}Nb_{2/3})O_{3}-PbTiO_3$ 단결정의 광 집적소자 응용을 위한 도파로 제작
-
Yang, Woo-Seok
(KETI) ;
-
Lee, Sang-Goo
(IBULE) ;
-
Koo, Kyoung-Hwan
(IBULE) ;
- Huh, Hyun (Sunchon Cheongam Coll.) ;
-
Yoon, Dae-Ho
(SungKyunkwan Uni.) ;
-
Lee, Han-Young
(KETI)
- Published : 2002.11.07
Abstract
Ni thin film on the PMN-PT crystal wafer were deposited by using E-beam evaporator technique. Deposited film was patterned by UV-lithography and etching and was in-diffused at 300~600C. Diffusion profile of Ni ions in PMN-PT was measured by secondary ion mass spectroscopy (SIMS).