한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2002년도 추계학술대회 논문집 Vol.15
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- Pages.264-267
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- 2002
초전도 박막 제작을 위한 산화 시스템의 특성( II )
Characteristics of Oxidation System for Superconductor Thin Film( II )
초록
An ozone condensation system is evaluated from the viewpoint of an ozone supplier for oxide thin film growth. Ozone is condensed by the adsorption method and its concentration is analyzed by three methods; ultraviolet absorption, thermal decomposition and Q-mass analyzing methods. Thermal decomposition method is found to be available to the concentration evaluation from dilution to highly condensed ozone. The highest ozone concentration condensed by the adsorption method is evaluated to be 97 mol%